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Patent Searching and Data


Title:
COMPOSITE VACUUM PUMP
Document Type and Number:
Japanese Patent JP2002070776
Kind Code:
A
Abstract:

To provide a vacuum pump having a simple structure with high efficiency, which can extract an exhaust gas directly from a vacuum chamber under a high degree of vacuum to the atmosphere.

A pump chamber 7 of which both sides are shut tightly with a first terminal wall 5 and a second terminal wall 6, and the chamber is divided into a first pump chamber 9 and a second pump chamber 10 with a dividing wall 8. An intake vent is provided on the first terminal wall 5, and an extraction port 13 is provided on the second terminal wall 6. Further, a connecting hole 15, which connects the first pump chamber 5 with the second pump chamber 6, is provided on the dividing wall 8. One pair of pawl rotors 26, 27 are put in the first pump chamber 9, thereby a pawl pump 2 is constituted. Further, one pair of screw rotors 28, 29 are put in the second pump chamber 10, thereby a screw pump 3 is constituted. So that, a gas being extracted from the vacuum chamber is first compressed by the pawl pump 2, next compressed by the screw pump 3, then purged into the atmosphere.


Inventors:
OZAWA OSAMU
TSUTSUMI SHUZO
Application Number:
JP2000256543A
Publication Date:
March 08, 2002
Filing Date:
August 25, 2000
Export Citation:
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Assignee:
KASHIYAMA KOGYO KK
International Classes:
F04C18/16; F04C18/12; F04C18/18; F04C23/00; F04C25/02; (IPC1-7): F04C25/02; F04C18/16; F04C18/18; F04C23/00
Attorney, Agent or Firm:
Takahide Tanaka