Title:
COMPOSITE VAPOR DEPOSITING MATERIAL AND ITS PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP3904136
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a composite vapor depositing material by which a vapor deposited film in which the composition in the initial stage of vapor deposition is composed of silver or an alloy of silver and aluminum, and the composition in the final stage of vapor deposition is composed of a low vapor pressure metal or metallic compound hard to be evapoated compared with the case of aluminum can be obtained by single vapor deposition operation.
SOLUTION: This vapor depositing material has a composite structure provided with an exterior material of silver or an exterior material on the outside of silver and an exterior material on the inside of aluminum, and the axial region is arranged with a low vapor pressure metal or metallic compound hard to be evaporated compared with the case of aluminum.
Inventors:
Shinji Furuichi
Application Number:
JP2000371071A
Publication Date:
April 11, 2007
Filing Date:
December 06, 2000
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
C23C14/24; C23C14/06; C23C14/14; (IPC1-7): C23C14/24; C23C14/06; C23C14/14
Domestic Patent References:
| JP2000087220A | ||||
| JP6101022A | ||||
| JP11236634A | ||||
| JP57164978A | ||||
| JP3070010U | ||||
| JP3069795U |