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Patent Searching and Data


Title:
COMPOSITION FOR FORMING INSULATION FILM
Document Type and Number:
Japanese Patent JP2008214454
Kind Code:
A
Abstract:

To provide a composition for forming an insulation film which is excellent in film properties such as permittivity and Young's modulus, capable of forming a film having a proper uniform thickness and suitable for using as an interlayer insulation film of semiconductor devices and the like.

The composition is formed by dissolving a cage type silsesquioxane compound in an organic solvent at a concentration of 12 mass%, which silsesquioxane compound has two or more unsaturated groups as substituents, and polymerizing the compound by using a polymerization initiator, wherein the composition is characterized by containing a polymer provided by polymerizing 70% of the compound and the polymerization initiator is preferably an azo compound.


Inventors:
MORITA KENSUKE
MURAMATSU MAKOTO
Application Number:
JP2007052632A
Publication Date:
September 18, 2008
Filing Date:
March 02, 2007
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
C08L43/04; C08F230/08; H01L21/312; H01L21/768; H01L23/522
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa