化合物、樹脂、組成物、レジストパターン形成方法、回路パターン形成方法及び樹脂の精製方法

Japanese Patent JP7385827

B2

A compound represented by the following formula (1).(In the formula (1), A is a group containing a heteroatom; R¹ is a 2n-valent group having 1 to 30 carbon atoms and optionally having a substituent; R² to R⁵ are each independently a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond and at least one R⁴ and/or at least one R⁵ is a hydroxy group and/or a thiol group; m² and m³ are each independently an integer of 0 to 8; m⁴ and m⁵ are each independently an integer of 0 to 9; n is an integer of 1 to 4; and p² to p⁵ are each independently an integer of 0 to 2.)

Takashi Makinoshima
Noriko Horiuchi
Masatoshi Echigo

JP2019569550A

November 24, 2023

January 31, 2019

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Mitsubishi Gas Chemical Co., Ltd.

C07C43/295; C07C41/18; C07C41/34; C07C315/04; C07C317/22; C07C319/20; C07C321/30; C08G4/00; G03F7/023; G03F7/11; G03F7/20; G03F7/26; H01L21/027

JP2009062398A
JP8087110A
JP8328243A
JP2005134434A
JP2016199472A
JP11029621A
JP4344286A
JP2009538943A
JP8127552A

WO2016158674A1
WO2014185335A1
WO2017188297A1
US3281465
WO2018101377A1

Yoshiyuki Inaba
Toshifumi Onuki
Kazuhiko Naito

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