CONCENTRATION CONTROLLER FOR WASH SOLUTION

Japanese Patent JPH04297908

A

PURPOSE:To simultaneously control the concentration and liquid level of a wash solution obtained by supplying a stock solution for washing and water. CONSTITUTION:The undiluted solution is supplied through an undiluted solution supply valve 8 to a vessel and water is supplied through a water supply valve 5 to the vessel. In this vessel, the concentration of the wash solution is detected by a concentration detector 3, and the liquid level is detected by a level detector 6. A concentration control part 4 calculates an undiluted solution supply amount FDA and a water supply amount FDW per unit time having a ratio so that deviation between a detected concentration value PV1 and a set concentration value SV1 of the wash solution can be close to zero. A level control part 7 calculates a total supply amount FL per unit time adding the amounts of the undiluted solution and water so that deviation between a detected level value PV2 and a set level value SV2 of the level can be close to zero. An undiluted solution/water mixing amount calculation part 11 calculates mixing amounts FA and FW of the total supply amount FL so as to maintain the concentration of the wash solution at the set concentration value SV1 based on the undiluted solution supply amount FDA, water supply amount FDW, total supply amount FL and set concentration value SV1 and according to these mixing amounts, the undiluted solution supply valve 8 and the water supply valve 5 are controlled.

TANAKA MAKOTO

JP6324991A

October 21, 1992

March 27, 1991

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TOSHIBA CORP

G05D9/12; G05D21/00; G05D27/00; G05D27/02; (IPC1-7): G05D9/12; G05D21/00; G05D27/00; G05D27/02

Kazuo Sato (3 others)

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