Title:
プラズマチャンバーにおいて半導体ワークピースを取り巻く導電性カラー
Document Type and Number:
Japanese Patent JP2004531059
Kind Code:
A
Abstract:
A plasma chamber apparatus and method having a process kit capable of reducing or eliminating electrical arcing from exposed metal at the perimeter of a workpiece. The plasma chamber includes a cathode electrode adjacent the workpiece. A process kit encircles the perimeter of the workpiece. The process kit includes a dielectric shield and an electrically conductive collar that overlies the dielectric shield. The resistivity of the conductive collar is 0.1 ohm-cm or less.
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Inventors:
Ma, Shaumin
Straub, Ralph, H., M.
Straub, Ralph, H., M.
Application Number:
JP2002580374A
Publication Date:
October 07, 2004
Filing Date:
February 08, 2002
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H05H1/46; H01J37/32; H01L21/205; H01L21/3065; (IPC1-7): H01L21/3065; H01J37/32; H01L21/205; H05H1/46
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yasuhito Suzuki
Yuichi Yamada
Yasuhito Suzuki