Title:
CONFIRMATION JIG AND ROTARY SHAFT INCLINATION ADJUSTING METHOD
Document Type and Number:
Japanese Patent JP2022001395
Kind Code:
A
Abstract:
To enhance workability in confirming inclination relation between a grinding rotary shaft and a polishing rotary shaft.SOLUTION: A confirmation jig 1 is fitted to a chuck table 205, and a flat top surface 12 of the confirmation jig 1 is used to adjust a grinding rotary shaft 351. Namely, inclination confirmation for confirming whether the grinding rotary shaft and a polishing rotary shaft 351 are in parallel with each other, and inclination adjustment for making them parallel with each other can be performed without detaching the chuck table 205. Consequently, the inclination confirmation and inclination adjustment can be improved in workability.SELECTED DRAWING: Figure 7
Inventors:
HAN JAE KWANG
OHINO KOICHI
OHINO KOICHI
Application Number:
JP2020107006A
Publication Date:
January 06, 2022
Filing Date:
June 22, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/00; B24B47/22; B24B41/06; B24B47/26; H01L21/304
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office