Title:
共焦点型検査装置
Document Type and Number:
Japanese Patent JP4224472
Kind Code:
B2
Inventors:
Toshiharu Takei
Application Number:
JP2005169960A
Publication Date:
February 12, 2009
Filing Date:
June 09, 2005
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
G02B21/00; G01B11/24
Domestic Patent References:
| JP4340911A | ||||
| JP2005107097A | ||||
| JP2005189475A |
Attorney, Agent or Firm:
Sadaji Miyakawa
Tadao Naito
Shigeo Shibata
Toshiyuki Kanai
Tadao Naito
Shigeo Shibata
Toshiyuki Kanai