Title:
CONFOCAL LASER SCANNING DIFFERENTIAL INTERFERENCE MICROSCOPE
Document Type and Number:
Japanese Patent JPH0694999
Kind Code:
A
Abstract:
PURPOSE: To provide a confocal laser scanning differential interference microscope capable of obtaining a differential interference image whose contrast is high.
CONSTITUTION: A specimen 25 is irradiated by a light spot, and a basic mode and a primary mode are excited in a double mode waveguide 27 with reflected light. The basic mode and the primary mode are respectively separated once, and the intensity of the basic mode is reduced, then both modes are made to interfere by being multiplexed again. The interference light is used to obtain the differential information of the area of the specimen 25 which is irradiated by the light spot.
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Inventors:
MATSUURA KEIJI
Application Number:
JP24463592A
Publication Date:
April 08, 1994
Filing Date:
September 14, 1992
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B21/00; (IPC1-7): G02B21/00
Attorney, Agent or Firm:
Sanshin Iwao (2 people outside)
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