PURPOSE: To combine installations constituting a manufacturing line in a series of process units working formation layers, by arranging modules of installations combined in a series of working process units along the manufacturing flow of products, in the case of layout arrangement of a production line.

CONSTITUTION: Installations 55 is divided into a processing unit 52, a conveying unit 53 and a wafer delivering unit 54. The conveying unit 53 and the wafer delivering unit 54 are turned into sheets 56 and standards 57. For example, in a wiring film processing installation, a compound installation 50 wherein a pre-washing installation, a film forming installation and a drying installation are collected is constituted. The parts of the conveying unit 53 and the wafer delivering unit 54 are standardized. For example, in a photolithography process installation, a through installation 51 wherein a resist coating installation, an exposing installation and a developing installation are collected is constituted. Thereby arrangement installation is enabled more easily than individual installation arrangement.