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Title:
CONTACT PRINTER
Document Type and Number:
Japanese Patent JPS6181624
Kind Code:
A
Abstract:
PURPOSE:To manufacture a photomask excellent in positional precision, by matching the positions of two opening and closing chambers with each other. CONSTITUTION:A chamber 2 for a master is provided with an indented portion 7, while another chamber 4 for a dry plate is provided with a projecting portion 8 to be fitted in said indented portion. The chambers 2 and 4 can not be closed on the occasion of contact exposure when the indented portion 7 and the projecting portion 8 are not matched in position with each other. By this construction, a photomask being excellent in positional precision can be obtained.

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Inventors:
TANAKA TSUYOSHI
Application Number:
JP20316584A
Publication Date:
April 25, 1986
Filing Date:
September 28, 1984
Export Citation:
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Assignee:
NEC CORP
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03F7/20
Attorney, Agent or Firm:
Sugano Naka



 
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