Title:
CONTACT TYPE ATOMIC FORCE MICROSCOPE
Document Type and Number:
Japanese Patent JP2010078329
Kind Code:
A
Abstract:
To provide a contact type atomic force microscope capable of rapidly obtaining a stable image of surface shape of a specimen in a state of an atmospheric pressure not in environmental control when the surface shape is measured by a contact mode having high sensitivity for irregularities.
A non-measuring region is provided outside a measuring region used to measure the surface shape, a modulation signal from a modulation signal oscillator 18 is given to a Z-scanner 6 to vibrate it in a Z-axis direction while a probe 2 is scanning the non-measuring region, thereby preventing an adsorption force acting between the specimen S and the probe 2.
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Inventors:
KOJIMA HIDEO
Application Number:
JP2008243536A
Publication Date:
April 08, 2010
Filing Date:
September 24, 2008
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01Q60/38; G01Q10/06
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