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Title:
CONTACT TYPE IMAGE SENSOR
Document Type and Number:
Japanese Patent JPS63181368
Kind Code:
A
Abstract:

PURPOSE: To make it possible to prevent the problem such as the adhesion and the like of dust to a light-receiving part generated when a photoetching operation is performed on an electrode by a method wherein the light-receiving part and a wiring pad part are connected by an impurity-doped silicon thin film.

CONSTITUTION: The contact type image sensor, consisting of the wiring pad part 7 connected to the light-receiving part 2 and the lead-out circuit formed on a substrate 5, is constructed in such a manner that the light-receiving part 2 and the wiring pad part 7 are connected by an impurity-doped silicon thin film 6. Consequently, a photoetching process, to be performed on the lower electrode and a metal wiring electrode as in the case of the close-contact type image sensor manufactured in the past, can be omitted. As a result, the problem such as adhesion of dust and the like to the light-receiving part generated following the photoetching operation performed on the electrode can be prevented.


Inventors:
NISHIKAWA EIJI
Application Number:
JP1286387A
Publication Date:
July 26, 1988
Filing Date:
January 22, 1987
Export Citation:
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Assignee:
FUJI XEROX CO LTD
International Classes:
H01L27/146; H04N5/335; H04N5/369; (IPC1-7): H01L27/14; H04N5/335
Attorney, Agent or Firm:
Akira Yamatani



 
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