Title:
CONTAINER FOR PLATE-LIKE OBJECT
Document Type and Number:
Japanese Patent JPS57121245
Kind Code:
A
Abstract:
PURPOSE:To decrease an occupied space and on the other hand to enhance a storing capacity by a method wherein cartridges containing plates are stored in a serial arrangement. CONSTITUTION:A storing table 5, 6 which consists of a belt conveyor on which a plurality of cartridges 9 containing plates such as masks or wafers or the like can be placed in a serial arrangement,and a loader 10 and a transfering mean for transfer of cartridges 9 are provided. An empty cartridge 9 is transfered by a belt conveyor 6, and with a laterally sliding lever 13 it is put on an elevator 14. After plates are feeded, arranged in order and stored into the cartridge 9 here, the cartridge 9 is rotated by 90 deg. with a turning plate 16. Subsequently with a vertically sliding lever 23, the cartridge 9 is transfered onto the conveyor 5, and by an intermittent operation of the conveyor 5 it is arranged and stored on the conveyor 5 into a serial arrangement.
Inventors:
IBE HIROYUKI
Application Number:
JP637081A
Publication Date:
July 28, 1982
Filing Date:
January 21, 1981
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/22; H01L21/677; (IPC1-7): H01L21/22