Title:
連続マルチチャンバプロセス
Document Type and Number:
Japanese Patent JP6808761
Kind Code:
B2
Abstract:
An installation for carrying out a continuous multi-stage industrial process includes a housing that defines a first space and a second space that is connected to the first through a first connecting channel. Different pressure conditions prevail in these spaces during the course of the process. A process material is passed sequentially through the first space, the first connecting channel and the second space. A transported material is provided in the first connecting channel to form a free-flowing sealing zone with the process material and ensures that different process conditions will be maintained in the two spaces, and in particular that different pressures will be maintained in the two spaces. The invention also relates to a multi-stage continuous industrial process using such an installation.
Inventors:
MARKUS LEHMANN
Application Number:
JP2018569137A
Publication Date:
January 06, 2021
Filing Date:
June 29, 2016
Export Citation:
Assignee:
MARKUS LEHMANN
International Classes:
B01F25/90; B01J19/18; F26B17/00; F26B25/00
Domestic Patent References:
| JP2014143945A | ||||
| JP6058517A | ||||
| JP2010236731A |
Foreign References:
| US2174066 | ||||
| DE10148721A1 | ||||
| WO2010139331A1 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Yasuhiko Takada
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Yasuhiko Takada