To continuously and accurately detect the mutual relative position between a guidance position mark and a traveling object and its traveling direction by performing an integrated operation of signals of a sensor heads which are assembled from plural position detecting sensors that are the same type of a function.
Four position detecting coils 16a to 16d are arranged on axes which are orthogonally crossed. When detection values of the coils 16a to 16d are made as VA to VD, the center Om of a circular mark plate 61 (position mark plate 11) is on a circular arc with the radius of displacement distance rA which corresponds to a detection value VA from the center A of the coil 16a, and similarly, on a circular arc with the radius of displacement distance rB which corresponds to a detection value VB from the center B of the coil 16b. Therefore, the center Om is either of these two intersected points of the circular arcs (Xm, Ym) and (X'm, Y'm). Furthermore, a circular arc with the radius rC from the detection value Vc of the coil 16c, and the coordinates (Xm, Ym) of the center Om can be identified. Statistics processing is performed by using the fourth detection value VD.
NAGASHIMA SHIGEO
OMICHI TAKEO
KAMIMURA TAKEO
KAWANAMI SEIICHI
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