Title:
CONTROL DEVICE FOR CHEMICAL LIQUID CONCENTRATION
Document Type and Number:
Japanese Patent JP3212958
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a control device for chemical liquid concentration which allows measurement of chemical-liquid composition and composition control at all times without sampling it.
SOLUTION: A stock solution supply part 1 for supplying a stock solution, and a wafer process part 2 wherein, using a stock solution supplied from the stock solution supply part 1, a specified process is performed with a wafer 12, are provided. Here, a concentration detecting part 15, which installed directly to a piping 14 provided between the stock solution supply part 1 and the wafer process part 2, detects the concentration of stock solution passing the piping 14, and a data process part 3, wherein a specified concentration adjustment is performed based on the stock solution concentration detected with the concentration detecting part 15 and the concentration of stock solution supplied from the stock-solution supply part 1 is controlled, are provided.
Inventors:
Shinya Takita
Application Number:
JP35314498A
Publication Date:
September 25, 2001
Filing Date:
December 11, 1998
Export Citation:
Assignee:
Kyushu NEC Corporation
International Classes:
H01L21/306; B08B3/00; B08B3/02; B08B3/08; G05D11/13; H01L21/00; H01L21/304; (IPC1-7): H01L21/304; B08B3/02; B08B3/08; H01L21/306
Domestic Patent References:
| JP10223599A | ||||
| JP878380A | ||||
| JP720052A | ||||
| JP10223598A | ||||
| JP11173983A | ||||
| JP11224874A | ||||
| JP2000124185A | ||||
| JP424553A |
Attorney, Agent or Firm:
Yosuke Goto (1 person outside)