Title:
光照射式急速加熱処理装置の制御装置
Document Type and Number:
Japanese Patent JP3988338
Kind Code:
B2
Abstract:
There is provided a control apparatus for a light radiation-type rapid heating and processing device in which a power factor can be improved, the influence of a higher harmonics strain can be eliminated and a rapid temperature increase of a heated substrate can be performed without any delay in control. Lamps are arranged within a lamp chamber of the light radiation-type rapid heating and processing device, and the workpiece heated and processed is arranged in a processing chamber. The region where the lamps are arranged is divided into a plurality of zones corresponding to a distance from the center of the region, and at least one lamp is arranged in each of the zones. A power control unit is provided for each of the zones. The control parts generate a PWM signal in response to a control pattern stored in advance and send it to each of the power control units. The power control units are provided with a switching element which is turned ON/OFF by the PWM signal and control the power supplied to the lamp belonging to each of the zones.
Inventors:
Takayuki Kanno
Application Number:
JP28663799A
Publication Date:
October 10, 2007
Filing Date:
October 07, 1999
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; G05D23/19; H01L21/00; H01L21/324; H05B37/02; H05B39/04
Domestic Patent References:
| JP63269515A | ||||
| JP3196206A | ||||
| JP7114990A |
Attorney, Agent or Firm:
Shunichiro Nagasawa