Title:
研磨部材移動装置用制御装置
Document Type and Number:
Japanese Patent JP5483790
Kind Code:
B2
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Inventors:
Masahiro Takeuchi
Yoshio Wakana
Makoto Tayu
Hidekatsu Takeuchi
Makoto Ryokawa
Yoshio Wakana
Makoto Tayu
Hidekatsu Takeuchi
Makoto Ryokawa
Application Number:
JP2001201677A
Publication Date:
May 07, 2014
Filing Date:
July 03, 2001
Export Citation:
Assignee:
Takeya Co., Ltd.
International Classes:
A63F7/02; B24B31/05
Domestic Patent References:
| JP10118305A | ||||
| JP9735A | ||||
| JP10192546A | ||||
| JP3286792A |
Attorney, Agent or Firm:
Kazushi Imasaki