Title:
高周波電源装置の制御方法及び高周波電源装置
Document Type and Number:
Japanese Patent JP7348101
Kind Code:
B2
Abstract:
The present invention controls, within a frequency range, an output command value not to exceed the upper limit of an output command permitted by a high-frequency amplifier. A method for controlling a high-frequency power supply device and the high-frequency power supply device involve performing frequency control within a frequency range of variable frequencies, limiting the upper limit of an output command value for controlling an output of a high-frequency amplifier within the frequency range of variable frequencies on the basis of an output limit value, and thereby preventing damaging of the high-frequency amplifier caused by an excessive command.
Inventors:
▲高▼柳 敦
Hisanori Takeuchi
Koichi Takada
Soichi Yokoyama
Hiroshi Nakayama
Hisanori Takeuchi
Koichi Takada
Soichi Yokoyama
Hiroshi Nakayama
Application Number:
JP2020025573A
Publication Date:
September 20, 2023
Filing Date:
February 18, 2020
Export Citation:
Assignee:
Kyosan Manufacturing Co., Ltd.
International Classes:
H03H7/40; H05H1/46
Domestic Patent References:
| JP2006310245A | ||||
| JP2010114001A | ||||
| JP2013197080A | ||||
| JP10257774A | ||||
| JP2017135705A | ||||
| JP2004008893A | ||||
| JP2016046951A | ||||
| JP2012050296A | ||||
| JP2018533855A | ||||
| JP11087097A |
Attorney, Agent or Firm:
Aiwa Patent Attorneys Corporation