Title:
制御システム及び制御方法、露光装置及び露光方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP6536777
Kind Code:
B2
Inventors:
Koichi Sakata
Application Number:
JP2014168915A
Publication Date:
July 03, 2019
Filing Date:
August 22, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G05B11/36; G05B17/00; H01L21/027; H01L21/68
Domestic Patent References:
| JP2008198064A | ||||
| JP2013114297A | ||||
| JP6019553A | ||||
| JP2000330642A | ||||
| JP2010039003A |
Attorney, Agent or Firm:
Atsushi Tateishi