To provide a conveying and coating machine which is capable of largely shortening the cycle time.
The conveying and coating machine of substrates, transfers conveyance mechanisms 13, 14 from the state to hold a treated substrate W1 on a pad 14a of a conveyance mechanism 14 and to hold an untreated substrate W2 on the pad 13a of the conveyance mechanism 13 to the right side in the drawing. The treated substrate W1 is conveyed to the receiving position and the untreated substrate W2 is lifted to a coating treatment part S2. Then, the conveyance mechanism 14 returns to the alignment position during applying a coating liquid on the surface of the untreated substrate W2 at the coating treatment part S2 to hold a subsequent untreated substrate W3. Then, the conveyance mechanism 13 conveys the substrate W2 that has been subjected to the coating treatment to a substrate carrying out part S3. The conveyance mechanism 14 conveys the untreated substrate W3 that has been subjected to the coating treatment short of the coating treatment part S2. After that, the conveyance mechanisms 13, 14 are transferred to the right side in the drawing. The substrate W2 after the treatment is transferred to the receiving position by the surface conveyance and the untreated substrate W3 is lifted to the coating treatment part S2.
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SHIMIZU AKIHIRO
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