Title:
搬送ロボット
Document Type and Number:
Japanese Patent JP7269071
Kind Code:
B2
Abstract:
Provided is a conveyance robot (10) capable of preventing interference with a robot. The conveyance robot (10) having a first arm (16) and a second arm (14) rotatably connected to a rotation axis and hands (11, 12) for conveying a substrate has a storage unit remembering a first area (R1) and a second area (R2) set according to motion ranges of hands (11, 12), a first condition selected if an operation mode is manual operation of each axis rotation when the user operates the conveyance robot (10) by manual operation, and a second condition selected if an operation mode is linear manual operation when the user operates the conveyance robot (10) by manual operation. When the user operates the conveyance robot (10) by manual operation, the conveyance robot (10) reads the first condition or the second condition according to the operation mode and monitors whether positions of specific points of the hands (11, 12) suit the read conditions.
Inventors:
Kobayashi Takumi
Application Number:
JP2019069957A
Publication Date:
May 08, 2023
Filing Date:
April 01, 2019
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
| JP2018171690A | ||||
| JP2013157562A | ||||
| JP2001001291A | ||||
| JP2008100292A | ||||
| JP2013163231A | ||||
| JP2011151122A |
Attorney, Agent or Firm:
Hidehito Kono
Tono Kono
Tono Kono