To provide a conveyor equipped with a heating and cooling function for a work substrate which changes its longitudinal and lateral sizes corresponding to the longitudinal and lateral sizes of the work substrate in an extremely flexible manner with low cost and which uniformly heats and cools the whole work substrate under conveyance.

The conveyor includes a support frame extending in a carrying direction of the work substrate, a severed extrusion material made by severing an aluminum extrusion material to a desired length, and a rotor arranged between the plurality of severed extrusion materials and in contact with a lower surface of the work substrate to move the work substrate, wherein each of the severed extrusion material is uniformly formed with one or more cylindrical pipes in a cavity inside the severed extrusion material, the cylindrical pipe extending in a direction parallel to a longitudinal direction of the cavity and having a rod-like heater or a cooling water and the like supplying unit.

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