Title:
COOLING DEVICE, ILLUMINATION OPTICAL SYSTEM, EXPOSURE EQUIPMENT, AND GOODS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2016111268
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology which is advantageous to inhibiting harmful effect on the effective light source distribution and achieving high cooling efficiency of a light source.SOLUTION: A cooling device which cools heat generated by a light source part is provided. The cooling device includes: a cooling part provided outside a path of light from the light source part; and a heat pipe which connects a heating part of the light source part with the cooling part. The heat pipe is also used as an electrode wire.SELECTED DRAWING: Figure 2
Inventors:
HIRUMA KENTARO
FURUSAWA MANATO
OSAKA NOBORU
FURUSAWA MANATO
OSAKA NOBORU
Application Number:
JP2014249196A
Publication Date:
June 20, 2016
Filing Date:
December 09, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20; H01J7/26
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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