Title:
COOLING DEVICE
Document Type and Number:
Japanese Patent JPS51126032
Kind Code:
A
Abstract:
PURPOSE: To cool the electronic lense of the electronic microscope utilizing the heat of vaporization.
Inventors:
OKADA MORIHIRO
Application Number:
JP4260275A
Publication Date:
November 02, 1976
Filing Date:
April 08, 1975
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
H01J37/20; F25D3/10; F25D9/00; G12B15/02; H01J37/10; H01J37/141; (IPC1-7): F25D3/10; H01J37/10; H01J37/20