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Patent Searching and Data


Title:
COOLING TRAP UNIT EQUIPPED WITH REGENERATION MECHANISM
Document Type and Number:
Japanese Patent JP2009106834
Kind Code:
A
Abstract:

To provide a cooling trap unit equipped with a regeneration mechanism which shortens the regeneration time largely at the regeneration time when a condensed or solidified gas in a cooling panel is discharged to the outside of a cooling trap unit.

In the cooling trap unit 3 having a vacuum vessel 2 with a drain port 10, a refrigerator 1 connected to the vacuum vessel 2 so that an endothermic part 5 is located at the vacuum side and a cooling panel 7 to condense or solidify the gas, which is stuck and fixed to the endothermic part 5, it has a mechanism that a liquid is reservoired within the vacuum vessel 2 so that the liquid is brought into contact with the cooling panel 7 when the condensed or solidified gas in the cooling panel 7 is discharged to the outside of the vacuum vessel 2, thereby detecting the temperature change of the liquid by a temperature sensor 11 installed at the endothermic part 5 and then discharging the liquid from the drain port 10 on the basis of the detection signal representing that the temperature having reached a predetermined value.


Inventors:
HORIUCHI HISASHI
Application Number:
JP2007280305A
Publication Date:
May 21, 2009
Filing Date:
October 29, 2007
Export Citation:
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Assignee:
CANON ANELVA TECHNIX CORP
International Classes:
B01D8/00
Attorney, Agent or Firm:
Jyohei Yamashita
Hiroshi Shimura
Michio Nagai