Title:
COORDINATE MEASURING MACHINE
Document Type and Number:
Japanese Patent JP3430644
Kind Code:
B2
Abstract:
PURPOSE: To provide a coordinate measuring machine whose measuring accuracy is kept high, in which the structure of a carriage is simple and compact and which can be operated safely.
CONSTITUTION: A coordinate measuring machine is provided with a gate-shaped structure 7 which is constituted so as to stretch a Y-axis beam 6 on one pair of support members 11, 12 arranged on a surface plate 2 used to mount an object to be measured and which can be moved to the Y-axis direction, with a Z-axis spindle 25 which has a measuring probe 27 and with an X-axis carriage 19 which supports the Z-axis spindle 25 so as to be movable to the Z-axis direction and which is guided by the X-axis beam 6 so as to be movable to the X-axis direction. A space 18 which is extended to the X-axis direction and which is opened to the Z-axis direction and a guide face by which an X-axis carriage 19 housed in the space 18 is supported so as to be capable of being guided to the X-axis direction while a motion to the Y and Z-axis directions is being regulated are installed in the X-axis beam 6.
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Inventors:
Yasuo Aoki
Application Number:
JP16070094A
Publication Date:
July 28, 2003
Filing Date:
June 20, 1994
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B21/00; G01B21/20; (IPC1-7): G01B21/00; G01B21/20
Domestic Patent References:
| JP3185308A | ||||
| JP2296105A | ||||
| JP63172902U |
Attorney, Agent or Firm:
Osamu Kiuchi
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