Title:
COPOLYMER OF ALPHA,BETA-UNSATURATED NITRILE-CONTAINING ALICYCLIC POLYCYCLIC COMPOUND AND METHACRYLATE DERIVATIVE
Document Type and Number:
Japanese Patent JP3208602
Kind Code:
B2
Abstract:
PURPOSE: To obtain a copolymer suitable for photoresist being readily processed into thin film, etc., having high transparency in a far infrared region, comprising a specific adamantane, and a methacrylate derivative and a norbornene skeleton- containing methacrylate derivative.
CONSTITUTION: A polymer comprises a 1-(1'-cyanoethenyl)adamantane and a methacrylate derivative having a repeating unit of formula I (R is t-butyl or tetrahydropyranyl). A polymer comprises a 2norbornene-2-carbonitrile and a methacrylate derivative having a repeating unit of formula II.
Inventors:
Koji Nozaki
Application Number:
JP17312992A
Publication Date:
September 17, 2001
Filing Date:
June 30, 1992
Export Citation:
Assignee:
富士通株式会社
International Classes:
C08F220/18; C08F20/10; C08F20/42; C08F32/00; C08F220/44; C08F232/08; G03F7/039; (IPC1-7): C08F220/18; C08F220/44
Attorney, Agent or Firm:
Seiichi Samukawa