Title:
誘導自己組織化のためのコポリマー調合物、その製造方法、及びそれを含む物品
Document Type and Number:
Japanese Patent JP6377600
Kind Code:
B2
Abstract:
Disclosed herein is a method comprising disposing upon a substrate a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a reactive moiety that is operative to react with a substrate upon which it is disposed; and where the additive polymer comprises a homopolymer that is the chemically and structurally the same as one of the polymers in the block copolymer or where the additive polymer comprises a random copolymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent; and annealing the composition.
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Inventors:
Philip Dee Fustad
Peter Trefonas Third
See-Way Chang
Peter Trefonas Third
See-Way Chang
Application Number:
JP2015241149A
Publication Date:
August 22, 2018
Filing Date:
December 10, 2015
Export Citation:
Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
C09D153/00; B05D3/00; B05D7/24; C08F257/02; C09D153/02; H01L21/027
Domestic Patent References:
| JP2014186773A | ||||
| JP2014055291A | ||||
| JP2011515537A | ||||
| JP2014078713A |
Foreign References:
| WO2013173249A1 |
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office