Title:
硫酸銅めっき浴及び電気銅めっき方法
Document Type and Number:
Japanese Patent JP4154571
Kind Code:
B2
Inventors:
Hiroki Uchida
Isohisa Toshihisa
Shinji Tachibana
Yoko Goto
Isohisa Toshihisa
Shinji Tachibana
Yoko Goto
Application Number:
JP2002229412A
Publication Date:
September 24, 2008
Filing Date:
August 07, 2002
Export Citation:
Assignee:
Uemura Industry Co., Ltd.
International Classes:
C25D3/38; C25D7/00; C25D7/12; H01L21/28; H01L21/288
Domestic Patent References:
| JP2001003191A | ||||
| JP2000297395A | ||||
| JP2000510289A | ||||
| JP11310896A | ||||
| JP2000080494A | ||||
| JP7316875A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Saori Shigematsu
Katsunari Kobayashi