CORRECTION METHOD AND WORK-PIECE GRINDING METHOD

Title:

CORRECTION METHOD AND WORK-PIECE GRINDING METHOD

Document Type and Number:

Japanese Patent JP2023148880

Kind Code:

A

Abstract:

To suppress a grinding stone that constitutes a ground region from vibrating during grinding of a work-piece.SOLUTION: A correction method, which corrects shapes of an inner peripheral surface side and an outer peripheral surface side of a plurality of grinding stones of a grinding wheel, comprises: a holding step of suction-holding a dressing board with a chuck table; a correcting step of rotating the grinding wheel around a second rotary shaft around which the grinding wheel is rotated in a state where at least one grinding stone is inserted into a groove part in a circular arc shape formed in a dressing part, and further rotating the chuck table around a first rotary shaft, so as to correct the shapes of the inner peripheral surface side and the outer peripheral surface side of the plurality of grinding stones so that deviations of the second rotary shaft from centers of annular grinding surfaces defined on lower surface of the plurality of grinding stones are reduced, utilizing a first side surface of the groove part opposing to the inner peripheral surfaces of the plurality of grinding stones and a second side surface of the groove part opposing to the outer peripheral surfaces of the plurality of grinding stones; and a separating step of separating the plurality of grinding stones from the dressing part.SELECTED DRAWING: Figure 1

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