To pull up a cover film to smoothly separate it from a substrate without damaging the cover film, a photosensitive resin layer and the substrate by providing a pull-up member connected to a rotatable knurled roller and a rotatable adhesive roller, and pressing mechanism for applying vertical force to the pull-up member.

A knurled roller 5 and an adhesive roller 6 are connected to a pull-up member 4 by a fitting member 8 through each shaft 7. At this time, the pull-up member 4 is pressed in the vertical direction to a substrate 1 by an air cylinder 15 serving as pressing mechanism. The knurled roller 5 is journalled by a rotating shaft 9 and provided with lateral grooves 10 formed at the outer peripheral part. The adhesive roller 6 is journalled by another rotating shaft 11 and provided with a double-coated tape 12 stuck to the outer peripheral part. After forming micro voids 13 between a cover film 3 and a photosensitive resin layer 2 at a part passed by the knurled roller 5, the cover film 3 is pulled up in association with passing of the adhesive roller 6.