Title:
COVER MEMBER WITH THIN FILM, SOLID-STATE IMAGING DEVICE, AND METHOD OF MANUFACTURING COVER MEMBER WITH THIN FILM
Document Type and Number:
Japanese Patent JP2016086091
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cover member with a thin film in which a deposition area of an optical film having a film stress which is different between front and rear faces of a transparent member is adjusted, and that is adjusted so as to reduce warpage.SOLUTION: A cover member with a thin film comprises a first optical film 2 formed on a first surface of a transparent member 1, and a second optical film 3 formed on a second surface at an opposite side to the first surface. A film stress of the first optical film 2 is different from that of the second optical film 3. A deposition area of one optical film with a smaller film stress, of the first optical film 2 and the second optical film 3, is larger than that of the other optical film.SELECTED DRAWING: Figure 1
Inventors:
FUJISHIMA MASAYUKI
Application Number:
JP2014218317A
Publication Date:
May 19, 2016
Filing Date:
October 27, 2014
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
H01L27/14; H01L23/02; H04N5/225
Attorney, Agent or Firm:
Chieko Tateno