Title:
COVER STRUCTURE FOR AIRTIGHT CHAMBER
Document Type and Number:
Japanese Patent JP3694388
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize a cover structure for air tight chamber by which the top cover can be opened/closed smoothly without requiring a separate vertically movable mechanism.
SOLUTION: A cover base 16 is fixed on the upper-end opening part of an airtight chamber 2, and at least two holes 17 and 18 are made in the base 16. Then cover bodies 26, 28 and 30 are formed rotatably to hermetically seal the holes 17 and 18, so that the cover can be opened/closed smoothly without requiring a separate vertically movable mechanism and the space saving and reduction in time for opening/closing cover be realized, resulting in the improvement of maintenance efficiency and cost reduction.
Inventors:
Makoto Ozawa
Application Number:
JP15152297A
Publication Date:
September 14, 2005
Filing Date:
May 26, 1997
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
G02F1/13; C23C16/50; H01L21/205; H01L21/3065; H01L21/31; H01L23/02; (IPC1-7): H01L21/205; C23C16/50; G02F1/13; H01L21/31
Domestic Patent References:
| JP10299900A | ||||
| JP9209150A | ||||
| JP9067677A | ||||
| JP8078388A | ||||
| JP7045684A | ||||
| JP3001960U |
Attorney, Agent or Firm:
Shoji Miyoshi
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