Title:
CREEP-FEED GRINDING METHOD
Document Type and Number:
Japanese Patent JP2020089930
Kind Code:
A
Abstract:
To equalize an amount that each of a plurality of plate-like works is ground, when holding and creep-feed grinding the plate-works of different thicknesses.SOLUTION: The height of a grinding stone 37 is determined for each of a plurality of plate-like works 1 in a grinding stone height setting step, the height of the grinding stone 37 is set to the height determined for each of the plate-like works 1 in a grinding step, and the plate-like work 1 is ground. Thus, even if the heights of the upper surfaces of the plate-like works 1 differ when creep-feed grinding is carried out by holding the plurality of plate-like works 1 on a holding surface 19 of a holding table 18, an amount that each plate-like work 1 is ground can be made constant.SELECTED DRAWING: Figure 10
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Inventors:
YAMANAKA SATOSHI
MIYAMOTO HIROKI
MIYAMOTO HIROKI
Application Number:
JP2018227209A
Publication Date:
June 11, 2020
Filing Date:
December 04, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/02; B24B41/06; B24B47/22; B24B49/02; H01L21/304
Domestic Patent References:
| JPS60114452A | 1985-06-20 | |||
| JP2016002598A | 2016-01-12 | |||
| JPS6341454U | 1988-03-18 | |||
| JPS55107957U | 1980-07-29 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office