Title:
CROSS-LINKING CURABLE RESIN COMPOSITION LAMINATED BODY
Document Type and Number:
Japanese Patent JPH06236027
Kind Code:
A
Abstract:
PURPOSE: To provide a cross-linking curable resin composition laminated body capable of improving the accuracy for forming a resist without deteriorating the function as a supporting film and high in resolution.
CONSTITUTION: This cross-linking curable resin composition laminated body 10 is made by forming a light transmissive supporting film 14 at least on the surface of one side of a curable composition layer 12 and the supporting film is ≥1600kg/mm2 in Young's modulus, ≥75% in light transmittance and ≥50kg/m2 in rupture strength. Then, since the thickness of the supporting film is made thin, the expansion of transmitting light is suppressed and the curable composition layer 12 is exposed at high resolution.
Inventors:
KUSHI KENJI
ODA MASAHARU
FUJIWARA TADAYUKI
OTANI HIROYUKI
ODA MASAHARU
FUJIWARA TADAYUKI
OTANI HIROYUKI
Application Number:
JP2040093A
Publication Date:
August 23, 1994
Filing Date:
February 08, 1993
Export Citation:
Assignee:
MITSUBISHI RAYON CO
International Classes:
B32B7/02; B32B27/08; G03F7/004; G03F7/09; H05K3/00; (IPC1-7): G03F7/004; B32B7/02; B32B27/08; G03F7/09; H05K3/00
Attorney, Agent or Firm:
Masatake Shiga (2 outside)