Title:
CRUCIBLE APPLIED WITH DIAMOND COATING, METHOD AND DEVICE FOR VAPOR DEPOSITION OR DEPOSITION USING THE SAME
Document Type and Number:
Japanese Patent JP3907132
Kind Code:
B2
Abstract:
PURPOSE: To reduce the damage of PBN-made crucible due to the solidification and expansion of contents without necessitating an interrupt disable power source.
CONSTITUTION: A heat decomposable boron nitride-made crucible which is designed especially for a vacuum deposition of aluminum by a molecular beam epitaxy but not limited to that use has a hollow main body 10 whose end part is opened and a supporting flange 12 formed integrally with the main body. The hollow main body 10 and the supporting flange 12 are made of the heat decomposable boron nitride. An inner surface of the crucible is applied with a diamond coating 14 so that the hollow main body 10 is protected from the damage due to the aluminum.
Inventors:
Alistair Henderson Cane
Timothy David Bestwick
Jeffrey Dagan
Timothy David Bestwick
Jeffrey Dagan
Application Number:
JP27858195A
Publication Date:
April 18, 2007
Filing Date:
October 26, 1995
Export Citation:
Assignee:
Sharp Corporation
International Classes:
C23C14/24; C04B41/50; C04B41/85; F27B14/10; (IPC1-7): C23C14/24
Domestic Patent References:
| JP2138469A | ||||
| JP3228896A | ||||
| JP64028366A | ||||
| JP4168276A | ||||
| JP6135794A | ||||
| JP51109912A |
Attorney, Agent or Firm:
Hidesaku Yamamoto