Title:
クライオトラップ
Document Type and Number:
Japanese Patent JP6639129
Kind Code:
B2
Abstract:
According to the present invention, a cryo-trap is installed inside s case connected to a chamber which is a space to be separated while enabling a low-temperature panel cooled by a mechanical cooler to be spaced from a wall of the case. A plate surface of the low-temperature panel is installed to face an object to be separated inside the chamber and comprises an orifice plate installed on a front side of the plate surface.
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Inventors:
Junichi Yasuda
Yoshinobu Murayama
Hidetoshi Morimoto
Yoshinobu Murayama
Hidetoshi Morimoto
Application Number:
JP2015139977A
Publication Date:
February 05, 2020
Filing Date:
July 13, 2015
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F04B37/16; F04B37/08; F26B5/06
Domestic Patent References:
| JP2014208993A | ||||
| JP2010084702A | ||||
| JP2014509365A | ||||
| JP5574318B2 |
Attorney, Agent or Firm:
Shu Oikawa
Tomoo Katsumata
Ryo Tsuchiya
Tomoo Katsumata
Ryo Tsuchiya