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Title:
CRYOPUMP, CRYOPANEL STRUCTURE, AND EVACUATION METHOD
Document Type and Number:
Japanese Patent JP2014098311
Kind Code:
A
Abstract:

To provide a cryopump, a cryopanel structure, and an evacuation method for high-speed evacuation of non-condensable gas.

A cryopump 10 includes a nested array of cryopanels 102. A hydrogen molecule that enters a gap in the nested array of the cryopanels 102 is reflected by one of the cryopanels 102. The reflected hydrogen molecule is adsorbed by another of the cryopanels 102. Each of the plurality of cryopanels 102 may have an inverted truncated cone shape.


Inventors:
TAKAHASHI SO
Application Number:
JP2012249001A
Publication Date:
May 29, 2014
Filing Date:
November 13, 2012
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08
Domestic Patent References:
JPH10266957A1998-10-06
JPH0192591A1989-04-11
JP2012047120A2012-03-08
JP2009062891A2009-03-26
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo



 
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