Title:
クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
Document Type and Number:
Japanese Patent JP6534358
Kind Code:
B2
Abstract:
A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.
Inventors:
Takahashi Run
Application Number:
JP2016057050A
Publication Date:
June 26, 2019
Filing Date:
March 22, 2016
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08
Domestic Patent References:
| JP2014156831A | ||||
| JP710477U |
Foreign References:
| US20140260339 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo