Title:
クライオポンプ、クライオポンプ吸蔵ガス量推測装置及びクライオポンプ吸蔵ガス量推測方法
Document Type and Number:
Japanese Patent JP6615663
Kind Code:
B2
Abstract:
A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuum vessel, based on a vacuum measurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.
Inventors:
Takahashi Run
Application Number:
JP2016057049A
Publication Date:
December 04, 2019
Filing Date:
March 22, 2016
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08
Domestic Patent References:
| JP11072081A | ||||
| JP58143179A | ||||
| JP8061233A | ||||
| JP2007107398A |
Foreign References:
| US20050155358 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo