Title:
クライオポンプ・ハイブリッド前面アレイ
Document Type and Number:
Japanese Patent JP6659930
Kind Code:
B2
Abstract:
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array that is also cooled by the refrigerator. The frontal array comprises louvers across an otherwise substantially open center region of the frontal opening and an orifice plate across an outer region of the frontal opening. The hybrid frontal array allows for pumping speeds approximating those of a louver frontal array but with flow control comparable to an orifice plate.
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Inventors:
Wells Jeffrey A
Application Number:
JP2017501119A
Publication Date:
March 04, 2020
Filing Date:
March 19, 2015
Export Citation:
Assignee:
Edwards Vacuum Limited Liability Company
International Classes:
F04B37/16; F25B9/00
Domestic Patent References:
| JP2010196632A |
Foreign References:
| WO2012109304A2 |
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
▲吉▼田 和彦
Hiroyuki Suda
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto