Title:
CRYOPUMP SYSTEM, CRYOPUMP CONTROLLER, CRYOPUMP REGENERATION METHOD AND CRYOPUMP
Document Type and Number:
Japanese Patent JP2019203508
Kind Code:
A
Abstract:
To shorten a regeneration time of a cryopump.SOLUTION: A cryopump system comprises a cryopump 10, and a regeneration control unit 102 that controls the cryopump 10 according to a regeneration sequence including a discharge process that discharges a condensate from the cryopump 10 and in which roughing of the cryopump 10 is performed. The regeneration control unit 102 comprises a pressure drop rate calculation unit 114 that calculates a pressure drop rate in the cryopump 10 during roughing of the cryopump 10, and a pressure drop rate monitoring unit 116 that detects a reduction in the pressure drop rate during the roughing.SELECTED DRAWING: Figure 2
Inventors:
YATSU TAKAHIRO
Application Number:
JP2019152590A
Publication Date:
November 28, 2019
Filing Date:
August 23, 2019
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08
Domestic Patent References:
| JP2014173571A | 2014-09-22 | |||
| JP2012237293A | 2012-12-06 | |||
| JPH0914133A | 1997-01-14 | |||
| JPH08507115A | 1996-07-30 |
Foreign References:
| US6022195A | 2000-02-08 |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo