Title:
CRYOPUMP SYSTEM, OPERATION METHOD FOR CRYOPUMP SYSTEM, REFRIGERATOR SYSTEM, AND OPERATION METHOD FOR REFRIGERATOR SYSTEM
Document Type and Number:
Japanese Patent JP2019173756
Kind Code:
A
Abstract:
To improve energy saving performance of a cryopump system.SOLUTION: In a cryopump system 100, a cryopump 10 comprises: a refrigerator 12 comprising a low-temperature cooling stage and a high-temperature cooling stage; a low-temperature cryopanel to be cooled by the low-temperature cooling stage; and a high-temperature cryopanel to be cooled by the high-temperature cooling stage. A compressor unit 50 comprises a compressor body 52 for compressing working gas to be supplied to the refrigerator 12, and an operating frequency of the compressor body 52 can be changed. The compressor unit 50 is operated in such a manner that a pressure ratio between a high pressure and a low pressure of the compressor body 52 is between 1.6 and 2.5.SELECTED DRAWING: Figure 1
Inventors:
MATSUI TAKASATO
Application Number:
JP2019111131A
Publication Date:
October 10, 2019
Filing Date:
June 14, 2019
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2015098844A | 2015-05-28 | |||
| JP2017214936A | 2017-12-07 | |||
| JP2005283026A | 2005-10-13 |
Foreign References:
| WO2010038415A1 | 2010-04-08 |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo