Title:
CRYOPUMP
Document Type and Number:
Japanese Patent JP2019143537
Kind Code:
A
Abstract:
To inhibit dew condensation occurring in a cryopump or inhibit dropping of dew condensation water.SOLUTION: A cryopump 10 includes: a cryopump housing 70; and a water absorption layer 80 installed at the outer side of the cryopump housing 70. The cryopump 10 may further include a heat insulation layer 82 disposed between the cryopump housing 70 and the water absorption layer 80. The cryopump 10 may include a water absorption heat insulation sheet 84 having the water absorption layer 80 at the outer side and the heat insulation layer 82 at the inner side.SELECTED DRAWING: Figure 1
Inventors:
YATSU TAKAHIRO
Application Number:
JP2018028677A
Publication Date:
August 29, 2019
Filing Date:
February 21, 2018
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08
Domestic Patent References:
| JP2000161214A | 2000-06-13 | |||
| JPH06154505A | 1994-06-03 | |||
| JP2003121044A | 2003-04-23 | |||
| JP2017178349A | 2017-10-05 | |||
| JPH0872183A | 1996-03-19 | |||
| JPH0622827U | 1994-03-25 | |||
| JPH09174730A | 1997-07-08 | |||
| JPH1026427A | 1998-01-27 | |||
| JPH0439668U | 1992-04-03 |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo