Title:
CRYOPUMP
Document Type and Number:
Japanese Patent JP2023182630
Kind Code:
A
Abstract:
To provide a high-efficiency and high-performance cryopump which is filled with a cold storage material with large specific heat and small magnetization in a very low temperature region as well as good manufacturability.SOLUTION: A cryopump according to one embodiment is equipped with a refrigerator accommodating a cold storage material which is a granular body composed of an intermetallic compound, where a ThCr2Si2-type structure occupies 80 vol.% or more, and the crystallite size is 70 nm or less. In the ThCr2Si2-type structure of the cold storage material, the Th site is at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Sc and Y, the Cr site is at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni and Cu, and the Si site is at least one element selected from Si and Ge.SELECTED DRAWING: None
More Like This:
Inventors:
KAWAMOTO TAKAHIRO
EGUCHI TOMOKO
YAMASHITA TOMOHIRO
HAGIWARA MASAYA
SAITO AKIKO
USUI DAICHI
EGUCHI TOMOKO
YAMASHITA TOMOHIRO
HAGIWARA MASAYA
SAITO AKIKO
USUI DAICHI
Application Number:
JP2023154005A
Publication Date:
December 26, 2023
Filing Date:
September 20, 2023
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA MATERIALS CO LTD
TOSHIBA MATERIALS CO LTD
International Classes:
C09K5/14; F04B37/16; F25B9/00
Attorney, Agent or Firm:
Patent Attorney Tokyo International Patent Office
Previous Patent: How to adjust richness in ignition-controlled internal combustion engines
Next Patent: Method for manufacturing liposomes
Next Patent: Method for manufacturing liposomes