Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6466225
Kind Code:
B2
Abstract:
A cryopump includes a top cryopanel that partitions a shield cavity into a shield cavity upper portion and a shield cavity lower portion. A radiation shield includes a shield main slit that communicates a shield outside gap into the shield cavity lower portion. The radiation shield may include a shield auxiliary slit that is formed at a different position from that of the shield main slit in an axial direction of the cryopump and that communicates the shield outside gap into the shield cavity lower portion. The shield auxiliary slit may be formed between the top cryopanel and the shield main slit in the axial direction.
Inventors:
Oikawa Ken
Application Number:
JP2015073196A
Publication Date:
February 06, 2019
Filing Date:
March 31, 2015
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2010014066A | ||||
| JP2010048132A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
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