Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6466226
Kind Code:
B2
Abstract:
A cryopump includes a radiation shield, a top cryopanel, and a bottom cryopanel. The radiation shield includes a shield main slit that communicates a shield outside gap into a shield cavity. The top cryopanel includes a top cryopanel outer circumferential end located axially above the shield main slit. The bottom cryopanel includes a bottom cryopanel outer circumferential end located axially below the shield main slit. An annular vacant space is formed between the top cryopanel outer circumferential end and the bottom cryopanel outer circumferential end and the top cryopanel outer circumferential end is directly opposed to the bottom cryopanel outer circumferential end with the annular vacant space interposed therebetween.
Inventors:
Oikawa Ken
Application Number:
JP2015073197A
Publication Date:
February 06, 2019
Filing Date:
March 31, 2015
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2010048132A | ||||
| JP2010516939A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo