Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP6475211
Kind Code:
B2
Inventors:
Sisoev Sergey
Bartlett Allen Jay
Caselo john jay
Wells Jeffrey A
Aircobbat Michael Jay
Bartlett Allen Jay
Caselo john jay
Wells Jeffrey A
Aircobbat Michael Jay
Application Number:
JP2016207558A
Publication Date:
February 27, 2019
Filing Date:
October 24, 2016
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
F04B37/08
Domestic Patent References:
| JP2502034A | ||||
| JP2010084702A | ||||
| JP63501585A | ||||
| JP58124679U | ||||
| JP63112282U | ||||
| JP2007327396A | ||||
| JP61038179A |
Foreign References:
| US4896511 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko